RTP FURNACE
RTP rapid heating furnace by our company independently developed powerful heating equipment.The product adopts the international advanced manufacturing technology, innovative design, reasonable structure, furnace tubes can be automatically separated from the upper and lower halves of the furnace design, can freely open, safe and reliable. Furnace tube size 130MM, can be directly put five inches of the material. Furnace pure alumina of high density polyethylene fiber light vacuum forming, high reflectivity coated ultra-high temperature protective coatings, in addition to a minimum to maintain its energy consumption, but also to enhance the high temperature stability, can effectively reduce the heat loss .Sample in a sealed reaction zone quartz chamber, in a perfect completion of the production process, but also greatly reduces the possibility of secondary contamination sample. And has been widely used in semiconductor device development and production and other fields, the system can meet the rapid thermal annealing after ion implantation, but also for rapid alloy ohmic contact, can be used to anneal the silicide alloys, oxide growth, and CIGS Solar application of selenium deposition rapid thermal process applications.Dual tube design, graphene is the best means of production, the furnace and the furnace tube can slide freely between the gas and the temperature and vacuum control can be synchronized, you can also automate the process, coupled with a computer can be temperature, vacuum and gas flow to achieve control. As can be achieved systematically control and experimental repeatability for the operation would be very helpful! Is necessary for a laboratory equipment!
Items | The main technical indicators | Data |
Specification | HB-BTF-1200C-RTP | |
Temperature Control | Maximum temperature point | 1200 °C |
Rated temperature | 1100 °C |
Steady-state temperature range | 100 ~ 1050 °C |
Temperature measurement accuracy | ± 0.2 °C |
Repeatability Temperature Control | ± 1 °C |
Temperature control accuracy | ± 1 °C |
Temperature field uniformity | ± 2 °C |
Temperature status process time | 2 ~ 100 (100 ~ 1050 °C) |
Fastest heating rate | 300 °C / S |
Cooling rate | 1 to 300 can be used to open or remove the furnace tube furnace cooling cooling valve controlling the gas flow and start cooling. |
Temperature control mode | Intelligent fuzzy closed loop control |
| Touch screen size | 12 "LCD industrial computer |
Physical indicators | Max power (KW) | 16 |
Rated voltage | 220V/AC380 ~ 400V 50-60HZ automatic matching |
Sensor Type | Type K |
Reaction chamber diameter size | Φ130 × 350 |
Space efficient design | 5 " |
| |
Exhaust Port Size | KF25 |
Gas port size | Φ6mm dual card sets |
Cooling | Natural cooling or forced air cooling N2 or compressed air: 2psi (0.14kg/cm2) - 7psi (0.5kg/cm2) |
Overall net size | Length 920 × depth 500 × height 560mm |
Weight | Approximately 80Kg |